Liquid source delivery systems (vapor bubblers/vacuum vapor phase) include a gas system and a source controller. The source controller includes a temperature control system to maintain the liquid, which is held in a quartz or stainless-steel ampoule, at proper vapor pressures.
Tarius Technology provides complete source delivery systems are used for repeatable process results.
For LPCVD processes such as TEOS, a separate cabiet is provided to house the advanced source system.
Components are high vacuum-grade and are assembled for process precision and easy maintenance.
Atmospheric source processes and enhancements include:
LPCVD source processes are:
Tarius is noted for pristine, high performing gas systems with great attention to detail and maintainability.
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