DIFFUSION FURNACES
Tarius Technology diffusion furnaces are designed for optimum temperature accuracy and stability. Enclosed in a unitized, rugged, and thermally insulated cabinet structure, up to 4 heating elements are packaged for easy maintenance and extended service life.
VIEW OTHER PRODUCTS
- Processing Systems
- Available Processes
- Processing Subsystems
- Diffusion Furnances
- Small Batch Systems
- Source & Pump Cabinets
Subscribe
Sign up with your email address to receive news and updates.
- Unitized structural steel assembly
- Hinged, locking and removable element access doors
- Thermally insulated enclosure paneling
- High temperature Urethane coating
- Easy-to-adjust element alignment supports
- Cabinet overtemperature interlock sensor
- Leveling pads and optional seismic brackets
- Stainless steel construction
- Vents gases and heat from process tube or chamber
- Independently adjustable exhaust draw per tube-level
- Cantilever closure or manual door sealing per tube-level
- LPCVD flange and gas line fitting mounting scheme
- Differential pressure gauge to monitor exhaust draw
- Used to vent heated air from furnace cabinet top
- HVAC control of furnace room
- Water-cooled, high efficiency radiator
- Air baffle paneling ro direcrt air flow through cabinet
- Exhaust fan module for air exhaust draw
- Located within base of furnace cabinet
- Encloses transformers, terminals and wire bussing
- Encloses temperature controls and contractors/breakers
- Easy accessibility to componenets
- Pull down panels for easy access to control modules
- EMO safety controls
- Reduncant overtemperature interlock per element zone
- Elements
- Control and overtemperature TC spikes per zone
- TC wire channel
- TC holding and alignment clips
- Energy Kits
Low temperature range element 350℃ to 900℃
Mid temperature range element 600℃ to 1200℃
High temperature range element 600℃ to 1350℃
+/-0.5℃ tolerance 600℃ to 1350℃ range
+/-1.0℃ tolerance 350℃ to 600℃ range
Vacuum formed high purity alumina insulation
Stainless stell shroud
Helical windings with captive spacing
High purity alumina vestibule blocks
NEXTEL soft collars
Stainless steel capture rings, plates and collars
- High efficiency digital SSR/SCR firing circurity
- Power control and circuit protection with EMO
- NEC-grade wiring
- Easy accessibility to componenets
- Main and control power disconnect contractors
- Individual element power contractors and resets
- Illuminated power indicators
- Redundant overtemperature interlocks
- 208, 380, 415, 480VAC main power, 50 or 60Hz