Diffusion Furnaces
Our diffusion furnaces are designed for optimum temperature accuracy and stability. Enclosed in a unitized, rugged and thermally insulated cabinet structure, up to 4 heating elements are packaged for easy maintenance and extended service life.
Furnace Cabinet:
- Unitized structural steel assembly
- hinged, locking and removable element access doors
- Thermally insulated enclosure paneling
- High temperature Urethane coating
- Easy-to-adjust element alignment supports
- Cabinet overtemperature interlock sensor
- Leveling pads and optional seismic brackets
Toxic Gas Scavenger:
- Stainless steel construction
- Vents gases and heat from process tube or chamber
- Indepently adjstable exhaust draw per tube-level
- Cantilever closure or manual door sealing per tube-level
- LPCVD flange and gas line fitting mounting scheme
- Differntial pressure guage to monitor exhaust draw
Air-to-water Heat Exchanger:
- Used to vent heated air from furnace cabinet top
- HVAC control of furnace room
- Water-cooled, high efficiency radiator
- Air baffle paneling ro direcrt air flow through cabinet
- Exhaust fan module for air exhaust draw
Power Distribution:
- Located within base of firnace cabinet
- Encloses transformers, terminals and wire bussing
- Encloses temperature controls and contractors/breakers
- Easy accessibility to componenets
- Pull down panels for easy access to control modules
- EMO safety controls
- Reduncant overtemperature interlock per element zone