Products

GAS SYSTEMS AND LIQUID SOURCE DELIVERY SYSTEMS

Tarius Technology' gas systems are designed for:

• Diffusion, oxidation and LPCVD processing systems in Tarius Furnace Processing Systems
• Retrofitting existing furnace systems to upgrade or convert processes in existing furnace systems of most and make or model
• Customization for special gas delivery applications

A gas system, which is sometimes referred to as a "gas tray" or "gas platter", is a plate that provides mounting of all the gas control and plumbing components required to perform a specified process.

Tarius is noted for pristine, high performing gas systems with great attention to detail and maintainability.

Mass flow controller-based gas systems are standard. Rotameter gas systems are also available.

General component Information

• Bolt plate mounted components
• Type 316L seamless stainless steel tubing weldments with electropolish
• High performance mass flow controllers
• Orbital weld VCR and Microfit fittings throughout
• Pneumatic diaphragm valves
• Manual diaphragm valves
• Miniature solenoid valve manifolds for pneumatics
• Welded check valves
• Submicron inline filters
• Associated Teflon pluming and fittings

GAll gas systems are manufactured in the Tarius clean room, tested to high quality control standards and helium leak tested.