ASTRA Control System
The ASTRA Control System provides integrated control of all diffusion and LPCVD furnace system parameters. ASTRA is Ethernet-based using distributed control via a high-powered, tube-level microcomputer and intuitive, process-logical software.
All ASTRA operations are accomplished through graphical and animated, touch screen access. Comprehensive data acquisition, logging and graphing provide real-time assessments for optimum process management.
ASTRA Features
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- Processing Systems
- Available Processes
- Processing Subsystems
- Diffusion Furnances
- Small Batch Systems
- Source & Pump Cabinets
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- Microcomputer (per tube-level) Intel Core2Duo Processor
DDRII RAM
High capacity hard drive
Flash drive data transfer
Printer module
Microsoft Excel compatible
- High-Resolution
- Fab-friendly touch even with cleanroom gloves
- Multiple control loops
- Spike TC, profile TC or cascade control
- Auto profile or custom PID
- Programmable temperature tolerancing
- NIST offset program
- Data acquisition, logging and graphing
- 0.1 ℃ control resolution
- Multiple MFC control loops
- Programmable flow tolerance monitor and alerts
- Fault redirects with abort or branch
- Interface programming of peripheral components
- Comprehensive LPCVD vacuum control monitoring
- LPCVD auto leak-test protocol
- Hardware and firmware safety interlock
- Intelligent motor control
- Programmable motion and feedback logic
- End-of-travel sensing with next-step function
- Over-travel sensing with fault redirects
- 120/220/240VAC, 50 or 60 Hz with UPS
- Operation and programming
- Navigate
- Password management and access rights
- Recipe editing
- Temperature parameters
- Gas/fluid parameters
- Vacuum parameters
- Loading parameters
- Step times and event response editing
- Calibrations
- Alarm fault redirects
- Hardwire relay logic and firmware interlocks
ASTRA Benefits
- Precise control of temperature, gas and fluid flow, vacuum and loading parameters for optimum process performance and repeatability.
- Intuitive programming and operation through graphical touch screen access for easy training and operation.
- Tube-level microcomputer for high speed and masterful data management, which results in optimized yields and process tracking.
- Distributed control with full safety interlocks for gas flow, vacuum, temperature and loading, which provide safe, reliable operation.
- Optimized temperature control with divisible cascading and auto profiling to setup and maintain optimum temperature parameters.
- User permissions protocols assure only qualified personnel can access programming, recipes and parameters.
- Comprehensive alerts, alarms, redirects and monitors for all parameters. Provides instant responses, reporting and recording of anything that affects process performance or safety.
- Full maintenance accessibility with integral troubleshooting and calibrations. Provides data for maintenance with no additional maintenance computer required.
- Advanced LPCVD control and monitoring functions for sustained process repeatability.
- On-screen keyboard for easy data entry.
- Lot tracking/run history for multiple lots per run. Allows recipe tracking of wafers and wafer lots.
- Retrofitable to most any furnace brand or model. Modernizes all control attributes at low cost.
- Optional ASTRA Host System. Provides centralized factory recipe management, downloading, data acquisition and logging for up to 99 tube-levels.