ASTRA Control System
The ASTRA Control System provides integrated control of all diffusion and LPCVD furnace system parameters. ASTRA is Ethernet-based using distributed control via a high-powered, tube-level microcomputer and intuitive, process-logical software.
All ASTRA operations are accomplished through graphical and animated, touch screen access. Comprehensive data acquisition, logging and graphing provide real-time assessments for optimum process management.
Features
- Microcomputer (per tube-level)
Intel Core2Duo Processor.
DDRII RAM
High capacity hard drive
Falsh drive data transfer
Printer module
Microsoft Excel compatible. - Touch Screen
High-resolution
Fab-friendly touch even with cleanroom gloves - Temperature
Multiple contol loops.
Spike TC, profile TC or cascade control.
Auto profile or custom PID.
Programmable temperature tolerancing.
NIIST offset program.
Data acquisition, logging, and graphing.
0.1℃ control resolution. - Gas,Fluids and Vacuum
Multiple MFC control loops.
Programmable flow tolerance monitor and alerts.
Fault redirects with abort or branch.
Interface programming of peripheral componenets.
Comprehensive LPCVD vacuum control monitoring.
LPCVD auto leak-test protocol.
Hardware and firmware safety interlock. - Loading
Intelligent motor control.
Programmable motion and feedback logic.
End-of-travel sensing with next-step function.
Over-travel sensing with fault redirects. - Power
120/220/240VAC, 50 or 60 Hz with UPS - Example States and Functions.
Operation and programming.
Navigate.
Password management and access rights.
Recipe editing.
Temperature parameters.
Gas/fluid parameters.
Vacuum parameters.
Loading parameters.
Step times and event response editing.
Calibrations.
Alarm fault redirects.
Hardwire relay logic and firmware interlocks.
Benifits
- Precise control of temperature, gas and fluid flow, vacuum and loading parameters for optimum process process performance and repeatability.
- Intuitive programming and operation through graphical touch screen access for easy training and operation.
- Tube-level microcomputer for high speed and masterful data management, which results in optimized yields and process tracking.
- Distributed control with full safety interlocks for gas flow, vacuum, temperature and loading, which provide safe, reliable operation.
- Optimized temperature control with divisible cascading and auto profiling to setup and maintain optimum temperature parameters.
- User permissions protocols assure only qualified personnel can access programming, recipes, and parameters.
- Comprehensive alerts, alarms, redirects and monitors for all parameters. Provide instant responses, reporting and recording of anything that affects process performance or safety.
- Full maintenance accessibility with integral troubleshooting and calibrations. Provide data for maintenance with no additional maintenance computer required.
- Advanced LPCVD control and monitoring functions for sustained process repeatability.
- On-screen keyboard for easy data entry.
- Lot tracking/run history for multiple lots per run. Allows recipe tracking of wafers and wafer lots.
- Retrofitable to most any furnace brand or model. Modernizes all contol attributes at low cost.
- Optional ASTRA Host System. Provides centralized factory recipe management, downloading, data acquisition and logging for up to 99 tube-levels.