Products

LIQUID SOURCE DELIVERY SYSTEMS

Liquid source delivery systems (vapor bubblers/vacuum vapor phase) include a gas system and a source controller. The source controller includes a temperature control system to maintain the liquid, which is held in a quartz or stainless-steel ampoule, at proper vapor pressures.


Tarius Technology provides complete source delivery systems are used for repeatable process results.


For LPCVD processes such as TEOS, a separate cabiet is provided to house the advanced source system.


Components are high vacuum-grade and are assembled for process precision and easy maintenance.


Atmospheric source processes and enhancements include:


  • POCL3
  • BBr3
  • DCE source HCl gettering

LPCVD source processes are:


Tarius is noted for pristine, high performing gas systems with great attention to detail and maintainability.


  • TEOS
  • Phosphorous doped TEOS
  • High performance mass flow controllers
  • Boron and Phosphorous doped TEOS

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