Products

GAS SYSTEMS AND LIQUID SOURCE DELIVERY SYSTEMS

Tarius Technology' gas systems are designed for:


  • Diffusion, oxidation and LPCVD processing systems in Tarius Furnace Processing Systems
  • Retrofitting existing furnace systems to upgrade or convert processes in existing furnace systems of most and make or model
  • Customization for special gas delivery applications

A gas system, which is sometimes referred to as a "gas tray" or "gas platter", is a plate that provides mounting of all the gas control and plumbing components required to perform a specified process.


Tarius is noted for pristine, high performing gas systems with great attention to detail and maintainability.


Mass flow controller-based gas systems are standard. Rotameter gas systems are also available.


General component Information


  • Bolt plate mounted components
  • Type 316L seamless stainless steel tubing weldments with electropolish
  • High performance mass flow controllers
  • Orbital weld VCR and Microfit fittings throughout
  • Pneumatic diaphragm valves
  • Manual diaphragm valves
  • Miniature solenoid valve manifolds for pneumatics
  • Welded check valves
  • Submicron inline filters
  • Associated Teflon pluming and fittings

GAll gas systems are manufactured in the Tarius clean room, tested to high quality control standards and helium leak tested.

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