DIFFUSION FURNACES
Our diffusion furnaces are designed for optimum temperature accuracy and stability. Enclosed in a unitized, rugged and thermally insulated cabinet structure, up to 4 heating elements are packaged for easy maintenance and extended service life.
ASTRA Features
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- Processing Systems
- Available Processes
- Processing Subsystems
- Diffusion Furnances
- Small Batch Systems
- Source & Pump Cabinets
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FURNACE CABINET
- Unitized structural steel assembly
- Hinged, locking and removable element access doors
- Thermally insulated enclosure paneling
- High temperature Urethane coating
- Easy-to-adjust element alignment supports
- Cabinet overtemperature interlock sensor
- Leveling pads and optional seismic brackets
TOXIC GAS SCAVENGER
- Stainless steel construction
- Vents gases and heat from process tube or chamber
- Indepently adjstable exhaust draw per tube-level
- Cantilever closure or manual door sealing per tube-level
- LPCVD flange and gas line fitting mounting scheme
- Differntial pressure guage to monitor exhaust draw
AIR-TO-WATER HEAT EXCHANGER
- Used to vent heated air from furnace cabinet top
- HVAC control of furnace room
- Water-cooled, high efficiency radiator
- Air baffle paneling ro direcrt air flow through cabinet
- Exhaust fan module for air exhaust draw
POWER DISTRIBUTION
- Located within base of firnace cabinet
- Encloses transformers, terminals and wire bussing
- Encloses temperature controls and contractors/breakers
- Easy accessibility to componenets
- Pull down panels for easy access to control modules
- EMO safety controls
- Reduncant overtemperature interlock per element zone
ELEMENT KITS
- Elements
- Control and overtemperature TC spikes per zone
- TC wire channel
- TC holding and alignment clips
- Energy Kits
Low temperature range element 350 & to 900℃
Mid temperature range element 600℃ to 1200℃
High temperature range element 600℃ to 1350℃
+/-0.5℃ tolerance 600℃ to 1350℃ range
+/-1.0℃ tolerance 350℃ to 600℃ range
Vacuum formed high purity alumina insulation
Stainless stell shroud
Helical windings with captive spacing
High purity alumina vestibule blocks
NEXTEL soft collars
Stainless steel capture rings, plates and collars
POWER CONTROLS
- High efficiency digital SSR/SCR firing circurity
- Power control and circuit protection with EMO
- NEC-grade wiring
- Easy accessibility to componenets
- Main and control power disconnect contractors
- Individual element power contractors and resets
- Illuminated power indicators
- Redundant overtemperature interlocks
- 208,380,415,480VAC main power, 50 or 60Hz