Tarius Technology diffusion furnaces are designed for optimum temperature accuracy and stability. Enclosed in a unitized, rugged, and thermally insulated cabinet structure, up to 4 heating elements are packaged for easy maintenance and extended service life.



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  • Unitized structural steel assembly
  • Hinged, locking and removable element access doors
  • Thermally insulated enclosure paneling
  • High temperature Urethane coating
  • Easy-to-adjust element alignment supports
  • Cabinet overtemperature interlock sensor
  • Leveling pads and optional seismic brackets
  • Stainless steel construction
  • Vents gases and heat from process tube or chamber
  • Independently adjustable exhaust draw per tube-level
  • Cantilever closure or manual door sealing per tube-level
  • LPCVD flange and gas line fitting mounting scheme
  • Differential pressure gauge to monitor exhaust draw
  • Used to vent heated air from furnace cabinet top
  • HVAC control of furnace room
  • Water-cooled, high efficiency radiator
  • Air baffle paneling ro direcrt air flow through cabinet
  • Exhaust fan module for air exhaust draw
  • Located within base of furnace cabinet
  • Encloses transformers, terminals and wire bussing
  • Encloses temperature controls and contractors/breakers
  • Easy accessibility to componenets
  • Pull down panels for easy access to control modules
  • EMO safety controls
  • Reduncant overtemperature interlock per element zone
  • Elements
  • Low temperature range element 350℃ to 900℃

    Mid temperature range element 600℃ to 1200℃

    High temperature range element 600℃ to 1350℃

    +/-0.5℃ tolerance 600℃ to 1350℃ range

    +/-1.0℃ tolerance 350℃ to 600℃ range

    Vacuum formed high purity alumina insulation

    Stainless stell shroud

    Helical windings with captive spacing

  • Control and overtemperature TC spikes per zone
  • TC wire channel
  • TC holding and alignment clips
  • Energy Kits
  • High purity alumina vestibule blocks

    NEXTEL soft collars

    Stainless steel capture rings, plates and collars

  • High efficiency digital SSR/SCR firing circurity
  • Power control and circuit protection with EMO
  • NEC-grade wiring
  • Easy accessibility to componenets
  • Main and control power disconnect contractors
  • Individual element power contractors and resets
  • Illuminated power indicators
  • Redundant overtemperature interlocks
  • 208, 380, 415, 480VAC main power, 50 or 60Hz