ASTRA Control System

The ASTRA Control System provides integrated control of all diffusion and LPCVD furnace system parameters. ASTRA is Ethernet-based using distributed control via a high-powered, tube-level microcomputer and intuitive, process-logical software.

All ASTRA operations are accomplished through graphical and animated, touch screen access. Comprehensive data acquisition, logging and graphing provide real-time assessments for optimum process management.

ASTRA Features



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  • Microcomputer (per tube-level) Intel Core2Duo Processor

    High capacity hard drive

    Flash drive data transfer

    Printer module

    Microsoft Excel compatible

  • High-Resolution
  • Fab-friendly touch even with cleanroom gloves
  • Multiple control loops
  • Spike TC, profile TC or cascade control
  • Auto profile or custom PID
  • Programmable temperature tolerancing
  • NIST offset program
  • Data acquisition, logging and graphing
  • 0.1 ℃ control resolution
  • Multiple MFC control loops
  • Programmable flow tolerance monitor and alerts
  • Fault redirects with abort or branch
  • Interface programming of peripheral components
  • Comprehensive LPCVD vacuum control monitoring
  • LPCVD auto leak-test protocol
  • Hardware and firmware safety interlock
  • Intelligent motor control
  • Programmable motion and feedback logic
  • End-of-travel sensing with next-step function
  • Over-travel sensing with fault redirects
  • 120/220/240VAC, 50 or 60 Hz with UPS
  • Operation and programming
  • Navigate
  • Password management and access rights
  • Recipe editing
  • Temperature parameters
  • Gas/fluid parameters
  • Vacuum parameters
  • Loading parameters
  • Step times and event response editing
  • Calibrations
  • Alarm fault redirects
  • Hardwire relay logic and firmware interlocks

ASTRA Benefits

  • Precise control of temperature, gas and fluid flow, vacuum and loading parameters for optimum process performance and repeatability.
  • Intuitive programming and operation through graphical touch screen access for easy training and operation.
  • Tube-level microcomputer for high speed and masterful data management, which results in optimized yields and process tracking.
  • Distributed control with full safety interlocks for gas flow, vacuum, temperature and loading, which provide safe, reliable operation.
  • Optimized temperature control with divisible cascading and auto profiling to setup and maintain optimum temperature parameters.
  • User permissions protocols assure only qualified personnel can access programming, recipes and parameters.
  • Comprehensive alerts, alarms, redirects and monitors for all parameters. Provides instant responses, reporting and recording of anything that affects process performance or safety.
  • Full maintenance accessibility with integral troubleshooting and calibrations. Provides data for maintenance with no additional maintenance computer required.
  • Advanced LPCVD control and monitoring functions for sustained process repeatability.
  • On-screen keyboard for easy data entry.
  • Lot tracking/run history for multiple lots per run. Allows recipe tracking of wafers and wafer lots.
  • Retrofitable to most any furnace brand or model. Modernizes all control attributes at low cost.
  • Optional ASTRA Host System. Provides centralized factory recipe management, downloading, data acquisition and logging for up to 99 tube-levels.