ASTRA Control System
The ASTRA Control System provides integrated control of all diffusion and LPCVD furnace system parameters. ASTRA is Ethernet-based using distributed control via a high-powered, tube-level microcomputer and intuitive, process-logical software.
All ASTRA operations are accomplished through graphical and animated, touch screen access. Comprehensive data acquisition, logging and graphing provide real-time assessments for optimum process management.
ASTRA Features
VIEW OTHER PRODUCTS
- Processing Systems
- Available Processes
- Processing Subsystems
- Diffusion Furnances
- Small Batch Systems
- Source & Pump Cabinets
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Micro-Computer Controlled
- Intel Core2Duo Processor.
- DDRII RAM.
- High capacity hard drive.
- Flash drive data transfer.
- Printer module.
- Microsoft Exel compatible.
High-Resolution Touch Screen Interface
- Intuitive graphical touch interface
- Fab-Friendly touch controls, even with gloves
Temperature Control
- Multiple control loops.
- Spike TC, profile TC or cascade control.
- Auto profile or custom PID.
- Programmable temperature tolerancing.
- NIST offset program.
- Data acquisition, logging and graphing.
- 0.1 ℃ control resolution.
Gas, Fluids & Vacuum Control
- Multiple MFC control loops.
- Programmable flow tolerance monitor and alerts.
- Fault redirects with abort or branch.
- Interface programming of peripheral components.
- Comprehensive LPCVD vacuum control monitoring.
- LPCVD auto leak-test protocol.
- Hardware and firmware safety interlock.
Loading Control
- Intelligent motor control.
- Programmable motion and feedback logic.
- End-of-travel sensing with next-step function.
- Over-travel sensing with fault redirects.
Power
- Universal Compatibility!
- 120/220/240VAC
- 50 or 60 Hz
- Included UPS for loss of power failsafe
Example States & Functions
- Operation and programming.
- Navigate.
- Password management and access rights.
- Recipe editing.
- Temperature parameters.
- Gas/fluid parameters.
- Vacuum paramters.
- Loading parameters.
- Step times and event response editing.
- Calibrations.
- Alarm fault redirects.
- Hardwire relay logic and firmware interlocks.
ASTRA Benefits
- Precise control of temperature, gas and fluid flow, vacuum and loading parameters for optimum process performance and repeatability.
- Intuitive programming and operation through graphical touch screen access for easy training and operation.
- Tube-level microcomputer for high speed and masterful data management, which results in optimized yields and process tracking.
- Distributed control with full safety interlocks for gas flow, vacuum, temperature and loading, which provide safe, reliable operation.
- Optimized temperature control with divisible cascading and auto profiling to setup and maintain optimum temperature parameters.
- User permissions protocols assure only qualified personnel can access programming, recipes and parameters.
- Comprehensive alerts, alarms, redirects and monitors for all parameters. Provides instant responses, reporting and recording of anything that affects process performance or safety.
- Full maintenance accessibility with integral trouble- shooting and calibrations. Provides data for maintenance with no additional maintenance computer required.
- Advanced LPCVD control and monitoring functions for sustained process repeatability.
- On-screen keyboard for easy data entry.
- Lot tracking/run history for multiple lots per run. Allows recipe tracking of wafers and wafer lots.
- Retrofitable to most any furnace brand or model. Modernizes all control attributes at low cost.
- Optional ASTRA Host System. Provides centralized factory recipe management, downloading, data acquisition and logging for up to 99 tube-levels.