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PROCESSING SUBSYSTEMS

• Semiconductor
• Photovoltaics
• MEMS
• Nanotechnology
• III/V
• LEDS


Processing subsystems are process-specific components that are installed at each tube-level of the furnace system. These may include the process tube or chamber, wafer carriers, the type of cantilever and injectors and baffles.


The size and form of the process tube or chamber has a direct effect on uniformity, growth or deposition rate and film quality. In addition, wafer boats, carriers and the cantilever or push/puller that reside in the chamber during processing may effect results. For certain atmospheric diffusion and LPCVD processes specialized gas and fluid injectors are required to properly distribute fluids and reactants.


An associated gas or fluid delivery system must be configured to perform a specific process reaction properly and safely. For LPCVD, proper vacuum pumps and vacuum control/monitoring devices must be implemented for effective process results and repeatability.


Tarius Technology’ processing subsystems include field-proven design features to assure the best process results available. In addition, keen attention is paid to how wafers are handled during loading and unloading. Another key benefit is the maintainability and rugged simplicity of the design, which results in the high uptime and performance you would expect.


The following lists provide overviews of typical processing subsystem components.


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  • Process tube Semiconductor-grade quartz glass

                                  or

    High purity silicon carbide (high temperatures)

    Sized according to substrate, process and element

    Domed with associated process-specific gas inlets

    Optional profile TC port

    Cantilever loading configuration option

                                  or

    Manual loading configuration option (quartz glass)

    Ground joint with end cap for manual loading option

  • Loading

    Cantilever load beam options:

    High purity silicon carbide paddle

                                  or

    Dual rods sheathed in quartz glass

    Push/puller or manual sled options:

    Tubing or rods

                                  or

    Quartz glass tube with ceramic reinforcementc

    Peripheral quartz components for manual loading

Click here for more information on Loaders


  • Boats or Wafer Sleds

    Quartz glass wafer boats

    Cantilever configuration

    Sled-type mono boat

                                  or

    High purity silicon carbide boats (high temperatures)

  • Optional profile TC
  • Fluid, Gas and Thermal Baffles

    • Used for turbulence and fluid containment

    Quartz glass

                                  or

    High purity silicon carbide (high temperatures)

    Quartz wool thermal plug for heat containment

  • Gas or Gas/Fluid Delivery System

    • Configured to process-specific gas schematic

    Mass flow controller or rotameter flow devices

    Internal or external torch for pyrogenic oxidation

    Liquid source delivery systems for:
              POCl3
              BBr3
              DCE
              Others

    Peripheral interconnect plumbing

Click here for more information on Gas systems



  • Vacuum process chamber

    • Sized according to substrate, process and element

    Quartz glass LPCVD tube

    Domed with vacuum pump port

    May be flanged or open at load port

                                  or

    Open both ends for flanges

    Tarius manual LPCVD flange

    Hinged vacuum sealing door

    May be water-cooled

    Seals flanged quartz glass LPCVD process tube

                                  or

    Tarius "Fast Flange"

    Load port and optional vacuum port assemblies

  • Optional profile TC with vacuum connections
  • Boats or Wafer Sleds

    • Quartz glass wafer boats

    Cantilever configuration

    Sled-type mono boat

                                  or

    High purity silicon carbide boats (LPCVD poly)

    Quartz glass cageboats for processes such as:
              LTO, PSG and BPSG           Insitu doped poly           Poly and amorphous silicon

  • Depletion compensating injectors

    • Quartz glass with laser-drilled orfices

    For flat temperature processes such as:

              LTO, PSG and BPSG
              

    Insitu doped poly

              

    Poly and amorphous silicon

  • Loading

    • Cantilever load beam options:

    High purity silicon carbide paddle

                                  or

    Dual rods sheathed in quartz glass

    Push/puller or manual sled options:

    Tubing or rods

                                  or

    Quartz glass tube with ceramic reinforcement

    Peripheral quartz components for manual loading

Click here for more information on Loaders


  • Gas or Gas/Vacuum Fluid Delivery System

    • Configured to process-specific gas schematic

    Mass flow controller flow devices

    Vacuum source delivery system when applied to:

              TEOS, PTEOS, BPTEOS

    Injector diverter balancing valves when required

    Interconnect main supply lines to flanges

Click here for more information on Gas systems


  • Vacuum System

    • Sized according to process requirements

    Vacuum pump

    Roots Blower when applicable

    May be rotary vane pump or dry pump

    Vacuum lines

    Optional closed loop pressure control

    Associated vacuum valves

    N2 pump purge when applicable

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