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PROCESSING SUBSYSTEMS

• Semiconductor • Photovolatics • MEMS • Nanotechnology • III/V • LEDS


Processing subsystems are process-specific components that are installed at each tube-level of the furnace system. These may include the process tube or chamber, wafer carriers, the type of cantilever and injectors and baffles.


The size and form of the process tube or chamber has a direct effect on uniformity, growth or deposition rate and film quality. In addition, wafer boats, carriers and the cantilever or push/puller that reside in the chamber during processing may effect results. For certain atmospheric diffusion and LPCVD processes specialized gas and fluid injectors are required to properly distribute fluids and reactants.


An associated gas or fluid delivery system must be configured to properly and safely perform a specific process reaction. For LPCVD, proper vacuum pumps and vacuum control/monitoring devices must be implemented for effective process results and repeatability.


Tarius Technology' processing subsystems include field-proven design features to assure the best process results avaialble. In addtion, keen attention is paid to how wafers are handled during loading and unloading. Another key benefit is the maintainability and rugged simplicity of the design, which results in the high uptime and performance you would expect.


The following lists provide overviews of typical processing subsystem components.


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Process tube

  • Semiconductor-grade quartz glass or
  • High purity silicon carbide (high temperatures)
  • Sized according to substrate, process and element
  • Domed with associated process-specific gas inlets
  • Optional profile TC port
  • Cantilever loading configuration option or
  • Manual loading configuration option (quartz glass)
  • Ground joint with end cap for manual loading option

Loading

    Cantilever load beam options:

  • High purity silicon carbide paddle or
  • Dual rods sheathed in quartz glass

    • Push/puller or manual sled options:

  • Tubing or rods or
  • Quartz glass tube with ceramic reinforcementc
  • Peripheral quartz components for manual loading

Click here for more information on Loaders

Boats or Wafer Sleds

  • Quartz glass wafer boats
  • Cantilever configuration
  • Sled-type mono boat or
  • High purity silicon carbide boats (high temperatures)

Optional profile TC

Fluid, Gas and Thermal Baffles

  • Used for turbulence and fluid containment
  • Quartz glass or
  • High purity silicon carbide (high temperatures)
  • Quartz wool thermal plug for heat containment

Gas or Gas/Fluid Delivery System

  • Configured to process-specific gas schematic
  • Mass flow controller

    • or

  • Quartz glass or
  • rotameter flow devices
  • Internal or external torch for pyrogenic oxidation

    • Liquid source delivery systems for:

  • POCl3
  • BBr3
  • DCE

    • Others

  • Peripheral interconnect plumbing

Click here for more information on Gas systems


Vacuum process chamber

  • Sized according to substrate, process and element
  • Quartz glass LPCVD tube
  • Domed with vacuum pump port
  • May be flanged or open at load port or
  • Open both ends for flanges
  • Tarius manual LPCVD flange
  • Hinged vacuum sealing door
  • May be water-cooled
  • Seals flanged quartz glass LPCVD process tube or
  • Tarius "Fast Flange"
  • Load port and optional vacuum port assemblies

Optional profile TC with vacuum connections

Boats or Wafer Sleds

    Quartz glass wafer boats

  • Cantilever configuration
  • Sled-type mono boat or
  • High purity silicon carbide boats (LPCVD poly)
  • Quartz glass cageboats for processes such as: LTO, PSG and BPSG
  • Insitu doped poly
  • Poly and amorphous silicon

Depletion compensting injectors

  • Quartz glass with laser-drilled orfices
  • For flat temperature processes such as: LTO, PSG and BPSG
  • Insitu doped poly
  • Poly and amorphous silicon

Loading

  • Cantilever load beam options: •High purity silicon carbide paddle

    • or

  • Dual rods sheathed in quartz glass
  • Push/puller or manual sled options: Tubing or rods or
  • Quartz glass tube with ceramic reinforcement
  • Peripheral quartz components for manual loading

Click here for more information on Loaders

Gas or Gas/Fluid Delivery System

  • Configured to process-specific gas schematic
  • Mass flow controller flow devices
  • Vacuum source delivery system when applied to: TEOS, PTEOS, BPTEOS
  • Injector diverter balancing valves when required
  • Interconnect main supply lines to flanges

Click here for more information on Gas systems


Vacuum System

  • Sized according to process requirements

    • Vacuum System

  • Roots Blower when applicable
  • May be rotary vane pump or dry pump

    • Vacuum lines

  • Optional closed loop pressure control
  • Associated vacuum valves
  • N2 pump purge when applicable
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