Products

SMALL BATCH SYSTEMS

For Research, Pilotline and Education Applications



Tarius Technology provides small batch furnace pricessing systems for research, pilot line and educations applications. All Tarius Technology diffusion, oxidation and LPCVD processes for semiconductior, solar and science are available

To review available processes, please click here.


These research-grade systems include all the features of the Tarius production models packaged in small footprint.


Small Batch Systems Models


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  • Bench Top furnace with direct digital temperature control for 50 to 150mm diameter wafers and 125mm squeare substrates.
  • Available with optional stand.
  • Bench Top Furnace with direct digital temperature control for 150 to 200mm diameter wafers and 125mm square substrates.
  • Available with optional stand.
  • Stand-alone, partitioned furnace system for 50 to 150mm diameter wafers and 125mm square substrates.
  • Available with the ASTRA Control System. Manual or Cantilever loading.
  • Single-tube, 2,3 and 4-stack configurations.
  • Stand-alone, partitioned furnace system for 50 to 150mm diameter wafers and 125mm to 156mm squeare substrates.
  • Available with the ASTRA Control System. Manual or Cantilever loading.
  • Single-tube to 4-stack configurations.
  • Single-tube,2,3 and 4-stack configurations.

Full Processing Subsystems are available for each model configuration including quartz starter kits and peripherals.


For further information on Furnace Processing System componenets please click an associate link to follow: