For Research, Pilotline and Education Applications
Tarius Technology provides small batch furnace processing systems for research, pilot line and educations applications. All Tarius Technology diffusion, oxidation and LPCVD processes for semiconductor, solar and science are available.
These research-grade systems include all the features of the Tarius production models packaged in small footprint.
Small Batch Systems Models
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Example Dimensional Layout 4612-R Research Grade Furnace System
To review ASTRA Control System, please click here.
Full Processing Subsystems are available for each model configuration including quartz starter kits and peripherals.
To review Processing Subsystems, please click here.