For Research, Pilotline and Education Applications
Tarius Technology provides small batch furnace pricessing systems for research, pilot line and educations applications. All Tarius Technology diffusion, oxidation and LPCVD processes for semiconductior, solar and science are available
To review available processes, please click here.
These research-grade systems include all the features of the Tarius production models packaged in small footprint.
Small Batch Systems Models
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Full Processing Subsystems are available for each model configuration including quartz starter kits and peripherals.
For further information on Furnace Processing System componenets please click an associate link to follow: